Fundamental Principles of Optical Lithography: The Science of Microfabrication
| Author | : | |
| Rating | : | 4.35 (865 Votes) |
| Asin | : | 0470727306 |
| Format Type | : | paperback |
| Number of Pages | : | 534 Pages |
| Publish Date | : | 2015-10-28 |
| Language | : | English |
DESCRIPTION:
there is no other single book that covers the wide breadth of scientific disciplines needed in the practice of optical microlithography. The major topics covered within this text are optics (imaging and thin film interference effects), photoresist chemistry (chemical reactions, diffusion, and development phenomenon), lithography as a manufacturing process (process control, critical dimension control, and overlay), and resolution enhancement technologies.. From the Back Cover Microlithography is the main technical driving force behind one of the most impo
This is book is well known in the lithography community This is book is well known in the lithography community. So probably no need for this review.The book is well written and has broad coverage.It builds concepts step by step. So at the end, you might want to summarize what you learned to make it stick.My background: Optical Scientist working in computational lithography. "This book rocks." according to S. Mack. This book changed my life. I was poor, living in a dumpster and ignorant about the principles of optical lithography - and then I found this book. Now, I have a successful career and am a much happier person. Whatever you do, wherever you go, buy this book!. Very good Berend A bible, my life saver. Best book on lithography for both experts and starters. Thank you Chris!tip: also watch the youtube series from Chris Mack on lithography and chemical processes.
He is also an adjunct faculty member at the University of Texas at Austin. In 2003 he received the SEMI Award for North America for his efforts in lithography simulation and education. He then served as Vice President of Lithography Technology for KLA-Tencor for five years, until 2005. Mack developed the lithography simulation software PROLITH, and founded and ran the company FINLE Technologies fro ten years. Currently, he writes, teaches, and consults on the field of semicond
It comprises ten detailed chapters plus three appendices with problems provided at the end of each chapter.Additional Information:Visiting lithoguru/textbook/indexml enhances the reader's understanding as the website supplies information on how you can download a free laboratory manual, Optical Lithography Modelling with MATLAB®, to accompany the textbook. You can also contact the author and find help for instructors.. Films of both conductors and insulators are used to connect and isolate transistors and their components.By creating structures of these various components millions of transistors can be built and wired together to form the complex circuitry of modern microelectronic devices. In general, these processes fall into three categories: film deposition, patterning, and semiconductor doping. The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed